Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge

Authors

  • Shikha BINWAL Jamia Millia Islamia, Jamia Nagar, New Delhi, Delhi 110025
  • Jay K JOSHI Institute for Plasma Research, HBNI, Bhat Village, Gandhinagar, Gujarat 382428
  • Shantanu Kumar KARKARI Institute for Plasma Research, HBNI, Bhat Village, Gandhinagar, Gujarat 382428
  • Predhiman Krishan KAW Institute for Plasma Research, HBNI, Bhat Village, Gandhinagar, Gujarat 382428
  • Lekha NAIR Jamia Millia Islamia, Jamia Nagar, New Delhi, Delhi 110025
  • Huw LEGGATE Dublin City University, Glasnevin, Dublin 9
  • Aoife SOMERS Dublin City University, Glasnevin, Dublin 9
  • Miles M TURNER Dublin City University, Glasnevin, Dublin 9

DOI:

https://doi.org/10.48048/wjst.2019.4784

Keywords:

Emissive probe, electron temperature, transverse magnetic field, capacitive coupled discharge

Abstract

A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed.  With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.

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Author Biography

Shikha BINWAL, Jamia Millia Islamia, Jamia Nagar, New Delhi, Delhi 110025

Research Scholar

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Published

2018-07-09

How to Cite

BINWAL, S., JOSHI, J. K., KARKARI, S. K., KAW, P. K., NAIR, L., LEGGATE, H., SOMERS, A., & TURNER, M. M. (2018). Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge. Walailak Journal of Science and Technology (WJST), 16(6), 385–390. https://doi.org/10.48048/wjst.2019.4784